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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3TJ7MF5
Repositorysid.inpe.br/mtc-m21c/2019/07.01.15.14   (restricted access)
Last Update2019:07.01.15.14.41 (UTC) simone
Metadata Repositorysid.inpe.br/mtc-m21c/2019/07.01.15.14.41
Metadata Last Update2020:01.06.11.42.15 (UTC) administrator
DOI10.1116/1.5092435
ISSN2166-2746
Citation KeyUedaSilSouPicReu:2019:HiTePl
TitleHigh temperature plasma immersion ion implantation using hollow cathode discharges in small diameter metal tubes
Year2019
MonthJuly
Access Date2024, May 19
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size2806 KiB
2. Context
Author1 Ueda, Mário
2 Silva, Carla da
3 Souza, Gelson B. de
4 Pichon, Luc
5 Reuther, Helfried
Resume Identifier1 8JMKD3MGP5W/3C9JHSB
Group1 LABAP-COCTE-INPE-MCTIC-GOV-BR
2 CMS-ETES-SESPG-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Universidade Estadual de Ponta Grossa (UEPG)
4 Université de Poitiers
5 HZDR, Rossendorf
Author e-Mail Address1 mario.ueda@inpe.br
2 carla.silva@inpe.br
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume37
Number4
Pagese042902
History (UTC)2019-07-01 15:15:25 :: simone -> administrator :: 2019
2019-07-02 23:39:18 :: administrator -> simone :: 2019
2019-07-03 18:46:38 :: simone -> administrator :: 2019
2020-01-06 11:42:15 :: administrator -> simone :: 2019
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
AbstractHigh temperature nitrogen plasma immersion ion implantation (HT-NPIII) method was used to treat the internal walls of small diameter metal tubes made of SS304 and of Ti6-Al4-V (TAV). Using a lid in one side of the tubes was essential to reach high temperatures of 700900 °C, necessary for high thermal diffusion of nitrogen in Ti alloy samples placed inside the metal tubes for monitoring the HT-NPIII process. The used metal tubes also reached such high temperatures. New phases of TiN and Ti2N were successfully attained in the TAV samples with the treated layer thickness of more than 1.3 μm for all the tested cases. For tubes made of SS304, HT-NPIII treatments resulted in redeposition of FeN thick layers with high hardness on the surfaces of the internal walls of the tubes and on the monitoring samples. Obtaining such HT-NPIII conditions in these small metallic tubes was possible by achieving high plasma density through hollow cathode discharges inside those tubes. These results were compared to the ones obtained on the nitrogen implantation treatments of TAV samples in moderate to high temperatures carried out previously in the laboratory which indicated the superior performance of the presently reported method of surface modification.
AreaFISPLASMA
Arrangement 1urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > High temperature plasma...
Arrangement 2urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > High temperature plasma...
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4. Conditions of access and use
Languageen
Target File1.5092435.pdf
User Groupsimone
Reader Groupadministrator
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Visibilityshown
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ET2RFS
8JMKD3MGPCW/3F358GL
Citing Item Listsid.inpe.br/bibdigital/2013/09.25.21.49 1
sid.inpe.br/mtc-m21/2012/07.13.14.56.06 1
sid.inpe.br/bibdigital/2013/10.14.21.39 1
DisseminationPORTALCAPES; SCOPUS.
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
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